Uncooled infrared thermo-mechanical detector array: Design, fabrication and testing
Sensors and Actuators, A: Physical, cilt.156, sa.1, ss.88-94, 2009 (SCI-Expanded, Scopus)
- Yayın Türü: Makale / Tam Makale
- Cilt numarası: 156 Sayı: 1
- Basım Tarihi: 2009
- Doi Numarası: 10.1016/j.sna.2009.02.010
- Dergi Adı: Sensors and Actuators, A: Physical
- Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
- Sayfa Sayıları: ss.88-94
- Anahtar Kelimeler: Thermal detector, NETD, Optical readout, Diffraction grating, CCD camera
- İstanbul Medipol Üniversitesi Adresli: Hayır
Özet
Thermo-mechanical detector arrays in the 160 × 120 array format are designed, fabricated, and tested. Detectors are composed of SiNx and TiN as absorbing layer, Al to form bimaterial legs, and integrated diffraction grating interferometer underneath each detector. The detector array is a passive component and the optical readout is performed remotely with a laser and CCD camera. All noise sources are considered in making a detailed noise equivalent temperature difference (NETD) estimation, which revealed <30 mK NETD is achievable using >12-bit CCD camera for the readout. © 2009 Elsevier B.V.