2D CMUT array based ultrasonic micromanipulation platform

Zeshan A., Zhang X., Oralkan O., Yamaner F. Y.

2016 IEEE International Ultrasonics Symposium, IUS 2016, Tours, France, 18 - 21 September 2016, vol.2016-November identifier

  • Publication Type: Conference Paper / Full Text
  • Volume: 2016-November
  • Doi Number: 10.1109/ultsym.2016.7728665
  • City: Tours
  • Country: France
  • Keywords: acoustic tweezers, anodic bonding, CMUT, microfluidics, planar resonator, row/column-addressing
  • Istanbul Medipol University Affiliated: Yes


In this paper, we designed and simulated a multilayer planar resonator with target frequency of 2.5 MHz which is created over a row/column-addressed 2D CMUT array. We have shown through finite element modeling and simulations that a particle can be trapped and manipulated both in lateral and axial directions inside the fluid channel by activating CMUT elements; And calculated acoustic radiation force acting on a polystyrene particle of 10-μm radius. We fabricated a 32×32-element row/column-addressed 2D CMUT array on a glass substrate using anodic bonding technology. This approach provides a cost effective and easily implementable solution to micro-particle trapping and handling.