Two-wavelength grating interferometry for MEMS sensors
IEEE Photonics Technology Letters, cilt.19, sa.23, ss.1895-1897, 2007 (SCI-Expanded, Scopus)
- Yayın Türü: Makale / Tam Makale
- Cilt numarası: 19 Sayı: 23
- Basım Tarihi: 2007
- Doi Numarası: 10.1109/lpt.2007.908450
- Dergi Adı: IEEE Photonics Technology Letters
- Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
- Sayfa Sayıları: ss.1895-1897
- Anahtar Kelimeler: grating interferometry, micro-electro-mechanical-systems (MEMS), optical sensing, two-wavelength interferometry
- İstanbul Medipol Üniversitesi Adresli: Hayır
Özet
Diffraction gratings integrated with micro-electro- mechanical-systems (MEMS) offer shot noise limited sub-nanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range, which is demonstrated using a MEMS spectrometer with integrated diffraction grating. The two-laser illumination extended the detection range from 105 nm to 1.7 μm assuming the readout sensitivity is maintained at >50% of the maximum sensitivity. © 2007 IEEE.