Two-wavelength grating interferometry for MEMS sensors

Ferhanoğlu O., Toy M. F., Urey H.

IEEE Photonics Technology Letters, vol.19, no.23, pp.1895-1897, 2007 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 19 Issue: 23
  • Publication Date: 2007
  • Doi Number: 10.1109/lpt.2007.908450
  • Journal Name: IEEE Photonics Technology Letters
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Page Numbers: pp.1895-1897
  • Keywords: grating interferometry, micro-electro-mechanical-systems (MEMS), optical sensing, two-wavelength interferometry
  • Istanbul Medipol University Affiliated: No


Diffraction gratings integrated with micro-electro- mechanical-systems (MEMS) offer shot noise limited sub-nanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range, which is demonstrated using a MEMS spectrometer with integrated diffraction grating. The two-laser illumination extended the detection range from 105 nm to 1.7 μm assuming the readout sensitivity is maintained at >50% of the maximum sensitivity. © 2007 IEEE.