IEEE Photonics Technology Letters, cilt.19, sa.23, ss.1895-1897, 2007 (SCI-Expanded)
Diffraction gratings integrated with micro-electro- mechanical-systems (MEMS) offer shot noise limited sub-nanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range, which is demonstrated using a MEMS spectrometer with integrated diffraction grating. The two-laser illumination extended the detection range from 105 nm to 1.7 μm assuming the readout sensitivity is maintained at >50% of the maximum sensitivity. © 2007 IEEE.