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TOY M. F., FERHANOĞLU O., ÜREY H.
2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, Hualian, Taiwan, 12 - 16 August 2007, (Full Text)
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Publication Type:
Conference Paper / Full Text
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Doi Number:
10.1109/omems.2007.4373857
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City:
Hualian
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Country:
Taiwan
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Keywords:
optical sensing, grating interferometry, MEMS metrology
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Istanbul Medipol University Affiliated:
No