F. Y. Yamaner Et Al. , "A three-mask process for fabricating vacuum-sealed capacitive micromachined ultrasonic transducers using anodic bonding," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control , vol.62, no.5, pp.972-982, 2015
Yamaner, F. Y. Et Al. 2015. A three-mask process for fabricating vacuum-sealed capacitive micromachined ultrasonic transducers using anodic bonding. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control , vol.62, no.5 , 972-982.
Yamaner, F. Y., Zhang, X., & Oralkan, Ö., (2015). A three-mask process for fabricating vacuum-sealed capacitive micromachined ultrasonic transducers using anodic bonding. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control , vol.62, no.5, 972-982.
Yamaner, F., Xiao Zhang, And Ömer Oralkan. "A three-mask process for fabricating vacuum-sealed capacitive micromachined ultrasonic transducers using anodic bonding," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control , vol.62, no.5, 972-982, 2015
Yamaner, F. Y. Et Al. "A three-mask process for fabricating vacuum-sealed capacitive micromachined ultrasonic transducers using anodic bonding." IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control , vol.62, no.5, pp.972-982, 2015
Yamaner, F. Y. Zhang, X. And Oralkan, Ö. (2015) . "A three-mask process for fabricating vacuum-sealed capacitive micromachined ultrasonic transducers using anodic bonding." IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control , vol.62, no.5, pp.972-982.
@article{article, author={F. Yalçln Yamaner Et Al. }, title={A three-mask process for fabricating vacuum-sealed capacitive micromachined ultrasonic transducers using anodic bonding}, journal={IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control}, year=2015, pages={972-982} }