Zhang, X. Et Al. 2015. Fabrication of capacitive micromachined ultrasonic transducers with through-glass-via interconnects. IEEE International Ultrasonics Symposium, IUS 2015 , (Taipei, Taiwan).

Zhang, X., Yamanery, F. Y., & Oralkan, O., (2015). Fabrication of capacitive micromachined ultrasonic transducers with through-glass-via interconnects . IEEE International Ultrasonics Symposium, IUS 2015, Taipei, Taiwan

Zhang, Xiao, F. Yalcin Yamanery, And Omer Oralkan. "Fabrication of capacitive micromachined ultrasonic transducers with through-glass-via interconnects," IEEE International Ultrasonics Symposium, IUS 2015, Taipei, Taiwan, 2015

Zhang, Xiao Et Al. "Fabrication of capacitive micromachined ultrasonic transducers with through-glass-via interconnects." IEEE International Ultrasonics Symposium, IUS 2015 , Taipei, Taiwan, 2015

Zhang, X. Yamanery, F. Y. And Oralkan, O. (2015) . "Fabrication of capacitive micromachined ultrasonic transducers with through-glass-via interconnects." IEEE International Ultrasonics Symposium, IUS 2015 , Taipei, Taiwan.

@conferencepaper{conferencepaper, author={Xiao Zhang Et Al. }, title={Fabrication of capacitive micromachined ultrasonic transducers with through-glass-via interconnects}, congress name={IEEE International Ultrasonics Symposium, IUS 2015}, city={Taipei}, country={Taiwan}, year={2015}}